Clean Room Expansion - Ewing, NJ
In a design/build effort with a Contractor, we designed a 1,000 square foot expansion to an existing clean room at an OLED research and design facility. The existing air handling systems were not sufficient to accommodate the expansion and a new air-cooled chiller plant was designed that provided both process chilled water and cooling chilled water. The air handling system we designed with a dessicant de-humidification wheel in order to ensure the relative humidity in the space was maintained below 45%. A hydronic boiler was designed for reheat. The process chilled water distribution was designed to cool the cyro-compressors used for the deposition within the clean room.
A number of new sinks were added with acid-resistant piping systems connected to an existing waste neutralization tank. Deionized water system was modified to accommodate the expansion. Nitrogen piping was modified to serve the new components.
A tap off of the existing electric switchboard provided power to the space and backfed all of the existing electrical devices and equipment within the space. This included a future provision for connection of a generator.
Class 100,000 (ISO 8) clean room for Organic Light Emitting Diode (OLED) deposition.
- Fire Protection